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ckd_series_lcm_selection-guide_catalogue_en.pdf
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Allowable load weight 1000 100 10 Lo ad w ei gh t ( g) 0 0.1 0.2 0.3 0.4 0.5 0.6 Max. speed v (m/s) LCM-8 LCM-6 LCM-4.5 STEP-1 Confirm that the load moment in each direction is below the allowable value in all strokes. Model no. M1 M2 M3 LCM-*-4.5 0.24 0.22 0.29 LCM-*-6 0.28 0.23 0.34 LCM-*-8 0.28 0.38 0.34 Selection guide Allowable moment•Direction of moment guide, center position X• Guide center position dimensions• Model no. Stroke length XStandard With buffer Clean room spec. LCM-*-4.5 5 30 40 35 10 LCM-*-6 5 31.5 41.5 36.5 10 15 36.5 46.5 41.5 LCM-*-8 5 31.5 41.5 36.5 10 15 41.5 51.5 46.5…

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ckd_series_lcm_dimensions_catalogue_en.pdf
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(Projecting length for axial lead wire) (Projecting length for axial lead wire) HD 19.7 A RD 19.7 HD19.7 B RD19.7 LCM Series common switch installation, projection dimensions For rear lead wire outlet For front lead wire outlet Bore size (mm) Stroke length RD HD B1 color indicator type 2 color indicator type 4.5 5 12 7 - - 10 17 1.7 6.2 6 5 12 7 - - 10 17 1.7 6.2 15 22 1.7 6.2 8 5 12 7 - - 10 17 1.7 6.2 15 22 - - 20 27 1.7 6.2 Bore size (mm) Stroke length RD HD A1 color indicator type 2 color indicator type 4.5 5 12 17 2.7 7.2 10 7 17 6 5 13 18 10 8 18 15 8 23 8 5 13 18 10 8 18 15 13 28 20 8…

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ckd_series_mgd_1-2_0v_catalogue_en.pdf
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…

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ckd_series_mmd00_manual_valve_catalogue_en.pdf
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…

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ckd_series_mn4ga_mn4gb_variations_catalogue_en_cb23sa.pdf
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244 245 4SA/B0 4SA/B1 4GA/B MN4GA/B 4TB 4KA/B 4F 3MA/B0 3PA/B P/M/B 4F**0E SKH 4L2-4/ LMF0 PV5/ CMF 4GA/B (master) MN3S0/ MN4S0 Uniwire system NP/NAP/ NVP HMV/ HSV PCD/ FS/FD 3, 5 p o rt p ilo t o p erated valve B lock m anifold Appearance/Series Electric connection Model Position No. of solenoid JIS symbol Valve faculty Effective sectional area (2-position) (mm2) Applicable cylinder bore size Bo dy p or tin g Su b ba se p or tin g In di vi du al w iri ng m an ifo ld Voltage (V) AC100 * 1 DC24 DC12 Solenoid position Port A/B Electric connection S el ec tio n pa ge N or m al ly c lo se d N or m…

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ckd_series_mvb_5-6-7_0_catalogue_en.pdf
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118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…

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ckd_series_mvb_5-6-7_0_specs_catalogue_en.pdf
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119 C C B B A E D 1 2 3 4 5 6 7 11 12 15 13 14 18 10 9 8 16 17 No. Parts name Material No. Parts name Material Hexagon socket set screw Handle Manual rod Adaptor Bellows assembly O ring Body assembly E snap ring Spring washer SUS304 SUS303 A2011 ASL350,SUS316 FKM SUS304 SUS304 SUS304 1 2 3 4 5 6 7 8 9 Rod Spring washer C snap ring Valve disk A O ring Rod piece Valve disk B Flat headed cross cut screw Cross headed bolt SUS316 SUS304 SUS304 SUS316 FKM SUS304 SUS316 SUS304 SUS304 10 11 12 13 14 15 16 17 18 How to order Symbol Model No. MVB50 MVB60 MVB70 Fully open 175 205 252 Fully closed 160 185…

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ckd_series_smd2_catalogue_en_cb29Sa.pdf
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554 Specifications Bore size Actuation Working fluid Max. working pressure Min. working pressure Withstanding pressure Ambient temperature Port size Stroke tolerance Working piston speed Cushion Lubrication Allowable energy absorption SMD2 SMD2-L (with switch) Double acting Compressed air 0.7 1.05 -10 to 60 (to be unfrozen) +1.5 0 50 to 500 Rubber cushioned Not required (when lubrication, use turbine oil Class 1 ISOVG32.) 32 dia. Rc1/8 25 dia.20 dia.16 dia.6 dia. 0.15 10 dia. 0.50.190.10.10.005 0.036 mm MPa MPa MPa °C mm mm/s J 0.1 Stroke length Max. stroke length (mm) Min. stroke length…

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ckd_series_hvb_5-6-7-8_1_catalogue_en.pdf
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428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…

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ckd_series_hvb_41_catalogue_en.pdf
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HVB41 Series 426 Solenoid valve for high vacuum HVB41 Series NC (normally closed) type Port size: NPT1/4 (O ring sheet) JIS symbol NC (normally closed) type How to order C Voltage B Option HVB 8N AC100V41 5 3H A Connection Model no. 8N 8R NPT1/4 (with O ring seat) 1/4 VCR female joint (custom order) ConnectionA Symbol Descriptions 100 VAC 200 VAC 24 VDC 100 VAC (50/60Hz) 200 VAC (50/60Hz) 24 VDC VoltageC Blank 3H 3K B Blank Square terminal box + light G1/2 Square terminal box G1/2 Mounting plate OptionB Orifice 5 HVB41-8N-* HVB41-8R-* (custom order) Specifications Note 1: The durability may…

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