New Products Modular type compact regulator R2000/R2100 White Series Refer to the "Safety precautions" on the back of this catalog before starting use. CC-887A W Compressed air 1.0 1.5 5 to 60 0.05 to 0.85 1/4, 3/8 (1/2 is for an adaptor.) 0.31 Pressure gauge and nut for panel mount No Working fluid Max. working pressure MPa Withstanding pressure MPa Working temperature ˚C Setting pressure range (Note 2) MPa Reverse mechanism Port size Rc, G and NPT Product weight kg Standard accessories R2000-WModel no. How to order JIS symbol R2000 R2100 Overview Specifications R2100 (reverse regulator)…
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New Products Modular type compact regulator R2000/R2100 White Series Refer to the "Safety precautions" on the back of this catalog before starting use. CC-887A W Compressed air 1.0 1.5 5 to 60 0.05 to 0.85 1/4, 3/8 (1/2 is for an adaptor.) 0.31 Pressure gauge and nut for panel mount No Working fluid Max. working pressure MPa Withstanding pressure MPa Working temperature ˚C Setting pressure range (Note 2) MPa Reverse mechanism Port size Rc, G and NPT Product weight kg Standard accessories R2000-WModel no. How to order JIS symbol R2000 R2100 Overview Specifications R2100 (reverse regulator)…
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JIS symbol Compact electro pneumatic regulator (solenoid valve) EVS2 Series (1) Compact/lightweight 20% smaller and 35% lighter than the conventional model. Downsize and lighten your equipment with this model. (2) Longer service life Three times that of our previous model. (3) High precision/high responsiveness High precision and high-speed response control of fluid pressure using electric signals. Provides 0.3% F.S. repeatability, 0.1% F.S. resolution, 0.1 sec. response time (without load). (4) 2-color display of the operational status On the 2-color operation indicator, green means the…
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JIS symbol Compact electro pneumatic regulator (solenoid valve) EVS2 Series (1) Compact/lightweight 20% smaller and 35% lighter than the conventional model. Downsize and lighten your equipment with this model. (2) Longer service life Three times that of our previous model. (3) High precision/high responsiveness High precision and high-speed response control of fluid pressure using electric signals. Provides 0.3% F.S. repeatability, 0.1% F.S. resolution, 0.1 sec. response time (without load). (4) 2-color display of the operational status On the 2-color operation indicator, green means the…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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