654 Block manifold compact direct operating precision regulator MNRJB500 Series Mix manifold of RJB500/RB500 Series Port size: push-in joint 4, 6, 8 JIS symbol Flow characteristic MNRJB500A-**C64 MNRJB500A-**C86 MNRJB500B-**C4 MNRJB500B-**C6 Pressure characteristic Compressed air 0.8 1.2 5 to 60 0.02 to 0.5 (0.01 to 0.2) (Note 1) 0.001 (lock sensitivity 0.004) (Note 2) 1.5 (Note 3) Push-in joint: 4, 6 Rc1/8 Push-in joint 6, 8 Push-in joint 4, 6 Specifications Descriptions Working fluid Max. working pressure Withstanding pressure Ambient temperature range Set pressure range Sensitivity Air…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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497 SAB/ SVB Explosion proof For dry air HVB/ HVL NP/NAP/ NVP PD/FAD/ PJ CVE/ CVSE CPE/ CPD Custom order Medical analysis Other G.P. systems HNB/G USB/G FAB/G FGB/G FVB FWB/G FHB FLB AB AG AP/AD CHB/G MXB/G APK/ ADK La rg e flo w r at e 3 po rt v al ve NP/NAP/NVP Large flow rate 3 port valve ■ For air and low vacuum Overview Features C O N T E N T S Always read the precautions on Introduction and Page 498 before starting use. Safety precautions 498 3 port solenoid valve for air NP13/NP14 500 3 port valve for air and low vacuum NAP11 506 3 port solenoid valve for air and low vacuum NVP11 510…
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24 Continuous use possible up to 80 Stable inner seal performance achieved with nonrotating rod (Patent pending) Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Handle position and top indicator indicate whether the valve is open or closed. Panel installation possible Inner seal performance stabilized with spring High corrosion resistant Ni-Co alloy diaphragm JXR joint connection *1 Standard (male and female) and double barbed joints OGD10V OGD20V Working fluid Working pressure range…
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118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…
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119 C C B B A E D 1 2 3 4 5 6 7 11 12 15 13 14 18 10 9 8 16 17 No. Parts name Material No. Parts name Material Hexagon socket set screw Handle Manual rod Adaptor Bellows assembly O ring Body assembly E snap ring Spring washer SUS304 SUS303 A2011 ASL350,SUS316 FKM SUS304 SUS304 SUS304 1 2 3 4 5 6 7 8 9 Rod Spring washer C snap ring Valve disk A O ring Rod piece Valve disk B Flat headed cross cut screw Cross headed bolt SUS316 SUS304 SUS304 SUS316 FKM SUS304 SUS316 SUS304 SUS304 10 11 12 13 14 15 16 17 18 How to order Symbol Model No. MVB50 MVB60 MVB70 Fully open 175 205 252 Fully closed 160 185…
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New Products Modular type compact regulator R2000/R2100 White Series Refer to the "Safety precautions" on the back of this catalog before starting use. CC-887A W Compressed air 1.0 1.5 5 to 60 0.05 to 0.85 1/4, 3/8 (1/2 is for an adaptor.) 0.31 Pressure gauge and nut for panel mount No Working fluid Max. working pressure MPa Withstanding pressure MPa Working temperature ˚C Setting pressure range (Note 2) MPa Reverse mechanism Port size Rc, G and NPT Product weight kg Standard accessories R2000-WModel no. How to order JIS symbol R2000 R2100 Overview Specifications R2100 (reverse regulator)…
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20 -101.3 to 0kPa Red 0 to 1MPa Blue 0 to 100kPa Green Carrier diffusion type semiconductor strain gauge Air / dry compressed air 0.3MPa ± 1%F.S. 3%F.S. or less ± 3%F.S. DC10 to 30V 5 to 50mA 4V or less 1mA or less When power turns ON, yellow LED lights Standard 3m (oil resistant vinyl cabtire code 2-conductor 0.15mm2) 0 to 50 °C (to be unfrozen.) Equivalent to IEC standards IP65 R1/8, 6 dia. plug and 6 dia. push in joint 0.6MPa 1.5MPa Pressure range Name plate color Note 2 Pressure sensitive element Applicable fluid Withstanding pressure Repeatability Hysteresis Temperature characteristics…
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28 Manual valve for process gas Parts compatible with other variations OGD*0V/MGD*0V Series Custom order Body options (pages 28 to 32) •Connection•Port shape combination•Handle color Model Variations Safety specification options (page 33) •Locking mechanism•Double action mechanism OGD10V OGD20V MGD10V MGD20V How to order OGD-V, MGD-V Series options Specifications Refer to specification pages for each series. GD 1O K40V RJ MF RJ R RM W S E Port shape combination F Handle color Symbol Blank MF FM FFF FFM FMM MMM WWW ConnectionD 2 way valve 3-way separate flow valve D Connection C Port size B…
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