338 4GA/B M4GA/B MN4GA/B W4GA/B2 W4GB4 4TB 4SA/B0 4SA/B1 4KA/B 4F 3MA/B0 3PA/B P/M/B 4F*0E SKH 4L2-4/ LMF0 MN3S0 MN4S0 MN3E0 MN4E0 4GA/B (Master) PV5/ CMF PV5G/ CMF NP/NAP/ NVP HMV HSV PCD/ FS/FD Ending 2QV 3QV Common specifications Descriptions Type of valve and operation method Working fluid Max. working pressure Min. working pressure Note 1 Withstanding pressure Ambient temperature Fluid temperature Manual override Lubrication Protective structure Vibration/impact Working environment Pilot operated soft spool valve Compressed air 0.7 Refer to main pressure in the table below. 1.05 -5 to 55…
File type: application/pdf
Referenced at:
428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…
File type: application/pdf
Referenced at:
430 HVB 1 Series 5 6 7 8 Internal structure and main parts materials Dimensions and optional dimensions HVB51-12F-3 HVB51-12F-5 HVB61-12F-3 HVB71-15F-3 HVB71-15F-5 HVB81-15F-3 HVB81-15F-5 A B C D E F G H I J 32 33 77 100 48 52 84 89 105 110 4-M4 4-M5 40 42.4 49 54 52 55 118 139 60 70 K Note: The line diode is enclosed only with the HVB61 and HVB81 AC specifications. Thus, the terminal box cannot be assembled with this series. Note: The internal structure differs in part for the HVB*1-**F-3. Model no. Symbol Note: This can be used as the bolt hole. 1 2 3 4 5 6 7 8 9 No. Parts name Material Core…
File type: application/pdf
Referenced at:
4A B2 P1 R5 R3 A4 2B 1P R5 R3
File type: application/pdf
Referenced at:
132 Discrete valve Sub base porting 4GB1/2/3 Series • Applicable cylinder bore size: 20 to 100 mm Common specifications Descriptions Working fluid Valve and solenoid type Min. working pressure Max. working pressure Withstanding pressure Ambient temperature Fluid temperature Manual override Pilot exhaust method Lubrication Protection structure Vibration/impact Working environment Compressed air Pilot operated soft spool valve 0.2 (2-position, 3-position) 0.7 1.05 -5 to 55 -5 to 55 Non-locking/lock common type Main valve/pilot valve common exhaust type Main valve/pilot valve individual exhaust…
File type: application/pdf
Referenced at:
10 Body options (pages 10 to 21) Flow path direction NC/NO combination Connection Port shape combination Fluid temperature Model Variations Actuator options (pages 22 to 23) Valve opening adjustment function Air indicator Microswitch Proximity switch Cylinder switch AGD0*V AGD1*V AGD2*V Air operated valve for process gas Parts compatible with other variations AGD**V Series Custom order C D Connection A Size How to order AGD 1 1 V 4 FRJ FFF 0 1 2 1/8" 1/4" 3/8" A G D 0 RJ R RM W S 1 2 NC NO E Port shape combination F Fluid temperature A G D 1 A G D 2 Model No. SizeA ActuationB Symbol Symbol…
File type: application/pdf
Referenced at:
348 4GA/B M4GA/B MN4GA/B W4GA/B2 W4GB4 4TB 4SA/B0 4SA/B1 4KA/B 4F 3MA/B0 3PA/B P/M/B 4F*0E SKH 4L2-4/ LMF0 MN3S0 MN4S0 MN3E0 MN4E0 4GA/B (Master) PV5/ CMF PV5G/ CMF NP/NAP/ NVP HMV HSV PCD/ FS/FD Ending 2QV 3QV Discrete master valve, manifold (metal base) Sub-base porting 4GB1/2/3 Series Applicable cylinder bore size: ø20 to ø100 Sub-base porting (discrete, manifold) Port No. 5 port 4GB111 4GB121 4GB131 4GB211 4GB221 4GB231 4GB311 4GB321 4GB331 M4GB111 M4GB121 M4GB131 M4GB211 M4GB221 M4GB231 M4GB311 M4GB321 M4GB331 2-position single 2-position double 3-position 2-position single 2-position…
File type: application/pdf
Referenced at:
6 Continuous use possible up to 80 Zero particle generation realized with optimum seal structure and improved surface roughness Electropolished finish specifications Slim 30 diameter actuator High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles achieved *2 ) JXR joint connection *1 1/4-inch size male and female fittings 22.5mm compact body *1: The JXR joint can be connected to the VCR joint. *2: Life when working fluid is inert gas within specified range, which does not contain solids such as reaction products. No. Parts name Materials for wetted areas Material Ni-Co…
File type: application/pdf
Referenced at:
8 Working fluid Working pressure range Pa(abs)-MPa Fluid temperature Ambient temperature Valve seat leakage Pa·m3/s(He) External leakage Pa·m3/s(He) Cv flow factor Connection Actuation Operating pressure MPa Operating pressure connection port Weight kg Inert gas/process gas 1.3 10-6 to 1.0 -10 to 80 -10 to 80 1.3 10-9 or less 2.8 10-12 or less Rc1/8 Specifications 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint NC (normally closed) NO (normally open) NC : 0.4 to 0.6 NO : 0.4 to 0.5 0.35 *1 High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles…
File type: application/pdf
Referenced at:
8 Working fluid Working pressure range Pa(abs)-MPa Fluid temperature Ambient temperature Valve seat leakage Pa·m3/s(He) External leakage Pa·m3/s(He) Cv flow factor Connection Actuation Operating pressure MPa Operating pressure connection port Weight kg Inert gas/process gas 1.3 10-6 to 1.0 -10 to 80 -10 to 80 1.3 10-9 or less 2.8 10-12 or less Rc1/8 Specifications 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint NC (normally closed) NO (normally open) NC : 0.4 to 0.6 NO : 0.4 to 0.5 0.35 *1 High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles…
File type: application/pdf
Referenced at: