HVB112 Series 424 Solenoid valve for high vacuum HVB112 Series NC (normally closed) type Port size: NPT1/8 HVB112-6N-* HVB112-8R-* (custom order) Specifications Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. NPT1/8 1/4 inch VCR female 0.15 0.24 B Voltage How to order HVB 6N AC100V112 5 Note: The older model HVB11-6N-5 is equivalent to the HVB112-6N-5. A Port size Model no. 6N 8R NPT1/8 1/4" JCR female joint (custom order) Port sizeA Symbol Descriptions 100 VAC 200 VAC 24 VDC…
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HVB112 Series 424 Solenoid valve for high vacuum HVB112 Series NC (normally closed) type Port size: NPT1/8 HVB112-6N-* HVB112-8R-* (custom order) Specifications Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. NPT1/8 1/4 inch VCR female 0.15 0.24 B Voltage How to order HVB 6N AC100V112 5 Note: The older model HVB11-6N-5 is equivalent to the HVB112-6N-5. A Port size Model no. 6N 8R NPT1/8 1/4" JCR female joint (custom order) Port sizeA Symbol Descriptions 100 VAC 200 VAC 24 VDC…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…
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118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…
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