8 Working fluid Working pressure range Pa(abs)-MPa Fluid temperature Ambient temperature Valve seat leakage Pa·m3/s(He) External leakage Pa·m3/s(He) Cv flow factor Connection Actuation Operating pressure MPa Operating pressure connection port Weight kg Inert gas/process gas 1.3 10-6 to 1.0 -10 to 80 -10 to 80 1.3 10-9 or less 2.8 10-12 or less Rc1/8 Specifications 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint NC (normally closed) NO (normally open) NC : 0.4 to 0.6 NO : 0.4 to 0.5 0.35 *1 High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles…
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6 Continuous use possible up to 80 Zero particle generation realized with optimum seal structure and improved surface roughness Electropolished finish specifications Slim 30 diameter actuator High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles achieved *2 ) JXR joint connection *1 1/4-inch size male and female fittings 22.5mm compact body *1: The JXR joint can be connected to the VCR joint. *2: Life when working fluid is inert gas within specified range, which does not contain solids such as reaction products. No. Parts name Materials for wetted areas Material Ni-Co…
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6 Continuous use possible up to 80 Zero particle generation realized with optimum seal structure and improved surface roughness Electropolished finish specifications Slim 30 diameter actuator High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles achieved *2 ) JXR joint connection *1 1/4-inch size male and female fittings 22.5mm compact body *1: The JXR joint can be connected to the VCR joint. *2: Life when working fluid is inert gas within specified range, which does not contain solids such as reaction products. No. Parts name Materials for wetted areas Material Ni-Co…
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10 Read the precautions on pages 7 to 12 in the introduction before use. Air-operated valve for chemical liquids Orifice: Ø6.3 to Ø10 AMD31232 Series Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A —> B) Working pressure range (B —> A) Valve seat leakage Back pressure Ambient temperature Frequency Installation attitude Orifice Cv value Bypass orifice (when bypass is installed) Operation section Chemical liquids, pure water (Note 1) 5 to 90 (5 to 160) (Note 5) 0.9 0 to 0.3 (Note 3) 0 to 0.1 (Note 3) 0 (at, water pressure) 0 to 0.1 (Note 3) 0 to 60…
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10 Read the precautions on pages 7 to 12 in the introduction before use. Air-operated valve for chemical liquids Orifice: Ø6.3 to Ø10 AMD31232 Series Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A —> B) Working pressure range (B —> A) Valve seat leakage Back pressure Ambient temperature Frequency Installation attitude Orifice Cv value Bypass orifice (when bypass is installed) Operation section Chemical liquids, pure water (Note 1) 5 to 90 (5 to 160) (Note 5) 0.9 0 to 0.3 (Note 3) 0 to 0.1 (Note 3) 0 (at, water pressure) 0 to 0.1 (Note 3) 0 to 60…
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100 Model No. Actuation Orifice AVB512 NC ø24 AVB612 NC ø40 AVB712 NC ø50 AVB812 NC ø80 AVB21 NC ø 5 Model No. Actuation Orifice AVB522 NO ø24 AVB622 NO ø40 AVB722 NO ø50 AVB822 NO ø80 Model No. Actuation Orifice AVB532 Double acting ø24 AVB632 Double acting ø40 AVB732 Double acting ø50 AVB832 Double acting ø80 Air operated valve for high vacuum AVB *2 Series Formed bellows type 5 6 7 8 Pilot-operated solenoid valve installable Long-life formed bellows Special stainless steel material (ASL350) Durability: 1 million times (*1) *1 Life when working media is inert gas within specified range,…
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100 Model No. Actuation Orifice AVB512 NC ø24 AVB612 NC ø40 AVB712 NC ø50 AVB812 NC ø80 AVB21 NC ø 5 Model No. Actuation Orifice AVB522 NO ø24 AVB622 NO ø40 AVB722 NO ø50 AVB822 NO ø80 Model No. Actuation Orifice AVB532 Double acting ø24 AVB632 Double acting ø40 AVB732 Double acting ø50 AVB832 Double acting ø80 Air operated valve for high vacuum AVB *2 Series Formed bellows type 5 6 7 8 Pilot-operated solenoid valve installable Long-life formed bellows Special stainless steel material (ASL350) Durability: 1 million times (*1) *1 Life when working media is inert gas within specified range,…
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92 Air operated valve for high vacuum AVB 1V Series Formed bellows type Aluminum body type 4 5 6 7 Model No. Actuation Orifice AVB41V NC ø16 AVB51V NC ø24 AVB61V NC ø40 AVB71V NC ø50 Precautions Always read page 9 in the introduction and the precautions on page 88 to 91 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch Much smaller and lighter with aluminum body Wetted areas (flow path) have no sliding sections that may generate particles. The aluminum body and dedicated actuator reduce the weight by approx.…
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92 Air operated valve for high vacuum AVB 1V Series Formed bellows type Aluminum body type 4 5 6 7 Model No. Actuation Orifice AVB41V NC ø16 AVB51V NC ø24 AVB61V NC ø40 AVB71V NC ø50 Precautions Always read page 9 in the introduction and the precautions on page 88 to 91 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch Much smaller and lighter with aluminum body Wetted areas (flow path) have no sliding sections that may generate particles. The aluminum body and dedicated actuator reduce the weight by approx.…
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90 Read the precautions on pages 7 to 12 in the introduction before use. GMMD34502 Series Chemical liquid manual valve (manifold/branch valve) Subject to Export Trade Control Ordinances *Target: GMMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Chemical liquids, pure water (Note 1) 5 to 90 (Note 3) 1.2 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60 Free Ø14.7 to Ø16 (Note 2) ODØ10 tube connection (fitting integrated type) ODØ12 tube connection…
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